منابع مشابه
Helicons—The Past Decade
First observed in gaseous plasmas in the early 1960’s, helicon discharges lay like a sleeping giant until they emerged in the 1980’s, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawn...
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ژورنال
عنوان ژورنال: Physical Review Letters
سال: 2015
ISSN: 0031-9007,1079-7114
DOI: 10.1103/physrevlett.114.205005